Abstract: In the manufacture which uses toxicity or dangerous gas, it is important that how to effectively monitor the special gas. The paper analyzes the requirement of the Gas Monitoring System in semiconductor manufacture, and designs the network architecture, the functions and alarm system of the Gas Monitoring System. It has been proved to be good in practice result.

Key words: gas detector, gas monitoring system, environment protection

摘要： 在使用毒性或危险性气体的制造行业中，如何实现对这些特殊气体的有效监控显得特别重要．本文通过对半 导体制造企业的气体监控系统的需求分析，设计了气体监控系统中的网络结构、监控软件功能以及报警系统．实践 效果良好

关键词: 气体检测器, 气体监控系统, 环境保护